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Chemical Engineering Principles of C V D Processes
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Chemical Engineering Principles of C V D Processes
by Dr. R. Nagarajan

Chemical vapour deposition (CVD) is a chemical process to produce films. This is the first way and common way to make Ti3SiC2 films. In a typical CVD process, the substrate is exposed to several volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit....

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About This Course

Chemical vapour deposition (CVD) is a chemical process to produce films. This is the first way and common way to make Ti3SiC2 films. In a typical CVD process, the substrate is exposed to several volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit....

Course Curriculum
5 Sections | 27 Lecture | 19h 51min total length
Expand all sections
Chemical Engineering Principles of C V D Processes

Module 1

| 10h 40min total length
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    Introduction

    33m <?php echo $alt; ?>
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    CVD Reactor & Process Design Fundamentals

    48m <?php echo $alt; ?>
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    Overview of CVD Process Fundamentals

    47m <?php echo $alt; ?>
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    Basics of Chemical Equilibrium Calculations & Flow Dynamics

    44m <?php echo $alt; ?>
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    Introduction to CVD Films

    48m <?php echo $alt; ?>
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    Film Structure & Properties

    48m <?php echo $alt; ?>
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    Pressure Effects on CVD Processes

    43m <?php echo $alt; ?>
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    CVD of Metals

    45m <?php echo $alt; ?>
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    CVD of Coatings

    47m <?php echo $alt; ?>
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    CVD Film Property Measurements

    50m <?php echo $alt; ?>
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    CVD Film Property Measurements: Qualitative & Quantitative

    45m <?php echo $alt; ?>
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    CVD in Tungsten Filament Lamps

    47m <?php echo $alt; ?>
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    CVD in Tungsten Filament Lamps: Design Aspects

    43m <?php echo $alt; ?>
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    CVD in Hot Corrosion

    46m <?php echo $alt; ?>
Chemical Engineering Principles of C V D Processes

Module 2

| 03h 39min total length
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    CVD Transport Phenomena: Conservation Equations

    39m <?php echo $alt; ?>
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    CVD Transport Phenomena: Constitutive Laws

    42m <?php echo $alt; ?>
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    CVD Transport Phenomena: Mass Transfer Mechanisms

    46m <?php echo $alt; ?>
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    CVD Transport Phenomena: Mass Transfer Analogy Condition (MTAC)

    43m <?php echo $alt; ?>
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    CVD Transport Phenomena: Effect of Homogeneous Reactions on MTAC

    47m <?php echo $alt; ?>
Chemical Engineering Principles of C V D Processes

Module 3

| 03h 37min total length
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    CVD Applications: Hot Filament CVD (HFCVD)

    47m <?php echo $alt; ?>
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    CVD Applications: Aerosol CVD (ACVD)

    45m <?php echo $alt; ?>
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    CVD Applications: CVD of Silicon

    44m <?php echo $alt; ?>
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    CVD Applications: CVD in Free-Molecular Flow Regime (FMFR)

    45m <?php echo $alt; ?>
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    CVD Applications: CVD of nano-Structured Films

    34m <?php echo $alt; ?>
Chemical Engineering Principles of C V D Processes

Module 4

101 Pages | 18min 19sec total length
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    CVD Overview

    18m <?php echo $alt; ?>
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    Lec26_CVD_Review

    43 pages <?php echo $alt; ?>
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    Lec27_CVD_Review

    48 pages <?php echo $alt; ?>
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    Lec28_CVD_QuestionBank

    10 pages <?php echo $alt; ?>
Chemical Engineering Principles of C V D Processes

Module 5

| 01h 35min total length
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    Basics of Nano-Structured Material Synthesis: Part I

    45m <?php echo $alt; ?>
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    Basics of Nano-Structured Material Synthesis: Part II

    50m <?php echo $alt; ?>
show 2 more sections
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